Influence of the ion bombardment on the growth and moisture permeation barrier properties of SiO2-like films deposited by remote plasma

A. Milella; M. Creatore; M.A. Blauw; M.C.M. Sanden, van de

Influence of the ion bombardment on the growth and moisture permeation barrier properties of SiO2-like films deposited by remote plasma

A. Milella, M. Creatore, M.A. Blauw, M.C.M. Sanden, van de

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Originele taal-2	Engels
Pagina's	B 5-
Status	Gepubliceerd - 2006
Evenement	18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands - Lunteren, Nederland Duur: 22 mrt. 2006 → 23 mrt. 2006

Congres

Congres	18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands
Land/Regio	Nederland
Stad	Lunteren
Periode	22/03/06 → 23/03/06
Ander	18th Symposium Plasma Physics and Radiation Technology, 22-23 March 2006, Lunteren, The Netherlands

Bibliografische nota

18th symposium plasma physics and radiation technology : March 22-23, 2006, Lunteren : programme and abstracts

Citeer dit

Milella, A., Creatore, M., Blauw, M. A., & Sanden, van de, M. C. M. (2006). Influence of the ion bombardment on the growth and moisture permeation barrier properties of SiO2-like films deposited by remote plasma. B 5-. Postersessie gepresenteerd op 18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands, Lunteren, Nederland.

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title = "Influence of the ion bombardment on the growth and moisture permeation barrier properties of SiO2-like films deposited by remote plasma",

abstract = "No abstract",

author = "A. Milella and M. Creatore and M.A. Blauw and {Sanden, van de}, M.C.M.",

note = "18th symposium plasma physics and radiation technology : March 22-23, 2006, Lunteren : programme and abstracts; 18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands ; Conference date: 22-03-2006 Through 23-03-2006",

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Influence of the ion bombardment on the growth and moisture permeation barrier properties of SiO2-like films deposited by remote plasma. / Milella, A.; Creatore, M.; Blauw, M.A. et al.
2006. B 5- Postersessie gepresenteerd op 18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands, Lunteren, Nederland.

Onderzoeksoutput: Bijdrage aan congres › Poster

TY - CONF

T1 - Influence of the ion bombardment on the growth and moisture permeation barrier properties of SiO2-like films deposited by remote plasma

AU - Milella, A.

AU - Creatore, M.

AU - Blauw, M.A.

AU - Sanden, van de, M.C.M.

N1 - 18th symposium plasma physics and radiation technology : March 22-23, 2006, Lunteren : programme and abstracts

PY - 2006

Y1 - 2006

N2 - No abstract

AB - No abstract

M3 - Poster

SP - B 5-

T2 - 18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands

Y2 - 22 March 2006 through 23 March 2006

ER -

Influence of the ion bombardment on the growth and moisture permeation barrier properties of SiO2-like films deposited by remote plasma

Samenvatting

Congres

Bibliografische nota

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