Inferential control of a wafer stage using disturbance observers

N.F.M. Mooren, N.J. Dirkx, R.J. Voorhoeve, Tom Oomen

Onderzoeksoutput: Bijdrage aan congresAbstractAcademic

4 Downloads (Pure)

Samenvatting

In high-precision motion systems it is often not possible to directly measure at the location where performance is required. Therefore, performance variables need to be inferred from non-collocated sensor measurements. If flexible behavior is negligible, a static sensor transformation is used to find a rigid-body (RB) approximation of the performance variable. However, for next-generation motion systems positioning accuracy is ever-increasing, leading to a situation where flexible dynamics are not negligible. As a result, traditional single degree-of-freedom (DOF) controllers are inadequate [1]. The aim of this research is to control the unmeasured performance variable while taking flexible behavior into account, through 2-DOF controller structures and disturbance observers.
Originele taal-2Engels
Pagina's138
Aantal pagina's1
StatusGepubliceerd - 15 mrt 2018
Evenement37th Benelux Meeting on Systems and Control - Kontakt der Kontinenten, Soesterberg, Nederland
Duur: 27 mrt 201829 mrt 2018
http://www.beneluxmeeting.nl/2018/

Congres

Congres37th Benelux Meeting on Systems and Control
LandNederland
StadSoesterberg
Periode27/03/1829/03/18
Internet adres

Vingerafdruk Duik in de onderzoeksthema's van 'Inferential control of a wafer stage using disturbance observers'. Samen vormen ze een unieke vingerafdruk.

  • Citeer dit

    Mooren, N. F. M., Dirkx, N. J., Voorhoeve, R. J., & Oomen, T. (2018). Inferential control of a wafer stage using disturbance observers. 138. Abstract van 37th Benelux Meeting on Systems and Control, Soesterberg, Nederland.