In high-precision motion systems it is often not possible to directly measure at the location where performance is required. Therefore, performance variables need to be inferred from non-collocated sensor measurements. If flexible behavior is negligible, a static sensor transformation is used to find a rigid-body (RB) approximation of the performance variable. However, for next-generation motion systems positioning accuracy is ever-increasing, leading to a situation where flexible dynamics are not negligible. As a result, traditional single degree-of-freedom (DOF) controllers are inadequate . The aim of this research is to control the unmeasured performance variable while taking flexible behavior into account, through 2-DOF controller structures and disturbance observers.
|Status||Gepubliceerd - 15 mrt 2018|
|Evenement||37th Benelux Meeting on Systems and Control - Kontakt der Kontinenten, Soesterberg, Nederland|
Duur: 27 mrt 2018 → 29 mrt 2018
|Congres||37th Benelux Meeting on Systems and Control|
|Periode||27/03/18 → 29/03/18|
Mooren, N. F. M., Dirkx, N. J., Voorhoeve, R. J., & Oomen, T. (2018). Inferential control of a wafer stage using disturbance observers. 138. Abstract van 37th Benelux Meeting on Systems and Control, Soesterberg, Nederland.