In situ studies of surface reactions during atomic layer deposition of Al2O3 and Pt films

Onderzoeksoutput: Bijdrage aan congres › Other › Academic

Samenvatting

No abstract.

Originele taal-2	Engels
Aantal pagina's	27
Status	Gepubliceerd - 2009
Evenement	Chemical Reactions at Surfaces, Gordon Research Conference, Ventura, USA: Chemical Reactions at Surfaces 2009 - Ventura Beach Marriott, Ventura, Verenigde Staten van Amerika Duur: 8 feb. 2009 → 13 feb. 2009

Congres	Chemical Reactions at Surfaces, Gordon Research Conference, Ventura, USA
Land/Regio	Verenigde Staten van Amerika
Stad	Ventura
Periode	8/02/09 → 13/02/09
Ander	Chemical Reactions at Surfaces, Gordon Research Conference

@conference{763ec05ed75d4cf1aa15d991a69a89f3,

title = "In situ studies of surface reactions during atomic layer deposition of Al2O3 and Pt films",

abstract = "No abstract.",

author = "W.M.M. Kessels",

year = "2009",

language = "English",

note = "Gordon Research Conference : Chemical Reactions at Surfaces 2009 ; Conference date: 08-02-2009 Through 13-02-2009",

}