Hysteresis in Motion Control Systems: A Frequency Domain Approach

Motion stages in high-precision equipment, such as lithography machines, are typically connected to the other parts of the machine. Hysteretic behaviour of such (dynamic) links is detrimental to the tracking performance. In this paper, a quasi-linear frequency-domain approach is presented to analyze the influence of such hysteretic dynamic links on closed-loop tracking performance. The results are demonstrated by means of an industrial relevant numerical example and prove the need for development of compensation schemes for dynamic link-induced disturbances. Moreover, it is shown that hysteresis induced by dynamic links in motion systems primarily affects performance in the low freuuency range.