Hybrid integral reset control with application to a lens motion system

K.G.J. Gruntjens, Marcel F. Heertjes, S.J.L.M. van Loon, Nathan van de Wouw, W.P.M.H. Heemels

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A hybrid integral controller with reset is proposed. This hybrid controller ensures improved low-frequency disturbance rejection properties under double integrator (PI2D) control without inducing the undesired increase of overshoot otherwise resulting from adding an extra linear integrator to a PID controller. The controller is applied to an optical lens motion system that requires PID control in one operating mode and PI2D control in the other, therewith motivating a hybrid integral control strategy. The reset element in the controller is included to improve transient performance. To guarantee closed-loop stability, a conditional (and partial) reset rule is introduced that restricts the input-output behavior of the dynamic reset element, i.e., the hybrid integrator with reset, to a bounded sector. As a result, stability can be guaranteed on the basis of a circle criterion-like argument and checked by (measured) frequency response data. Stability and performance of the hybrid integral control design with conditional (and partial) reset are investigated by application to a piezo-actuated lens system that is part of an industrial wafer scanner.

Originele taal-2Engels
Titel2019 American Control Conference, ACC 2019
Plaats van productiePiscataway
UitgeverijInstitute of Electrical and Electronics Engineers
Pagina's2408-2413
Aantal pagina's6
ISBN van elektronische versie978-1-5386-7926-5
DOI's
StatusGepubliceerd - 1 jul 2019
Evenement2019 American Control Conference, ACC 2019 - Philadelphia, Verenigde Staten van Amerika
Duur: 10 jul 201912 jul 2019
http://acc2019.a2c2.org

Congres

Congres2019 American Control Conference, ACC 2019
Verkorte titelACC2019
LandVerenigde Staten van Amerika
StadPhiladelphia
Periode10/07/1912/07/19
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  • Citeer dit

    Gruntjens, K. G. J., Heertjes, M. F., van Loon, S. J. L. M., van de Wouw, N., & Heemels, W. P. M. H. (2019). Hybrid integral reset control with application to a lens motion system. In 2019 American Control Conference, ACC 2019 (blz. 2408-2413). [8815268] Institute of Electrical and Electronics Engineers. https://doi.org/10.23919/acc.2019.8815268