High voltage power amplifier for high precision mechatronic systems

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Mechatronic systems within industrial applications, e.g. semiconductor manufacturing equipment, require power amplifiers providing high power with high precision. Increasing voltage is favourable compared to increasing current to generate more output power due to limitations in system infrastructure. For this purpose, this research proposes a High Voltage power amplifier by applying a 5-level Flying Capacitor Resonant Pole Inverter (FC RPI). Moreover, trapezoidal filter inductor current, charge-based zero-voltage switching, and an elaborate output and filter current control scheme are added to the amplifier configuration. A model of a mechatronic system is used to generate a current setpoint waveform representing the load current for a single phase of a planar actuator generating forces in two directions. Time domain and spectral domain analysis are presented of the results obtained from the simulation platform constructed of the mechatronic, control and electrical systems. The obtained simulation results indicate proper functioning of the converter configuration, paving the way for future hardware implementation.

Originele taal-2Engels
Titel2018 20th European Conference on Power Electronics and Applications (EPE'18 ECCE Europe)
Plaats van productiePiscataway
UitgeverijInstitute of Electrical and Electronics Engineers
Aantal pagina's10
ISBN van elektronische versie978-9-0758-1528-3
StatusGepubliceerd - 30 okt 2018
Evenement20th European Conference on Power Electronics and Applications, EPE 2018 ECCE Europe - Riga, Letland
Duur: 17 sep 201821 sep 2018
Congresnummer: 20
http://www.epe2018.com/

Congres

Congres20th European Conference on Power Electronics and Applications, EPE 2018 ECCE Europe
Verkorte titelEPE 2018 ECCE Europe
LandLetland
StadRiga
Periode17/09/1821/09/18
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