High-voltage actuation system for future generation lithography systems : actuator

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Originele taal-2Engels
Mijlpalentype toekennenASML Colloquium
StatusGepubliceerd - 21 jun 2016

Bibliografische nota

Poster

Citeer dit

@misc{4195215212a24a19a693c7a74e67ac25,
title = "High-voltage actuation system for future generation lithography systems : actuator",
author = "{van Beek}, T.A. and J.W. Jansen and B.L.J. Gysen and E.A. Lomonova",
note = "Poster",
year = "2016",
month = "6",
day = "21",
language = "English",
type = "Other",

}

High-voltage actuation system for future generation lithography systems : actuator. / van Beek, T.A.; Jansen, J.W.; Gysen, B.L.J.; Lomonova, E.A.

2016, ASML Colloquium.

Onderzoeksoutput: Andere bijdrageOverige bijdrageAndere onderzoeksoutput

TY - GEN

T1 - High-voltage actuation system for future generation lithography systems : actuator

AU - van Beek, T.A.

AU - Jansen, J.W.

AU - Gysen, B.L.J.

AU - Lomonova, E.A.

N1 - Poster

PY - 2016/6/21

Y1 - 2016/6/21

M3 - Other contribution

ER -