@inproceedings{bca5d82d858b49de8eac780c9ef92345,
title = "High rate plasma deposition of thin films for solar cell applications",
author = "\{Sanden, van der\}, M.C.M. and I. Volintiru and M. Creatore and J.L. Linden and B. Hoex and \{Oever, van den\}, P.J. and R.C.M. Bosch and \{Erven, van\}, R. and M.D. Bijker and M. Evers and W.M.M. Kessels",
year = "2004",
language = "English",
pages = "111--",
booktitle = "International symposium on inorganic and environmental materials 2004 : October 18-21, 2004, Eindhoven, The Netherlands : abstracts",
}