High-Q BAW resonator on Pt/Ta2O5/SiO2 based reflector stack

J.W. Lobeek; R.C. Strijbos; A. Jansman; N. Xin Li; A.B. Smolders; N.J. Pulsford

doi:10.1109/MWSYM.2007.380253

High-Q BAW resonator on Pt/Ta2O5/SiO2 based reflector stack

J.W. Lobeek, R.C. Strijbos, A. Jansman, N. Xin Li, A.B. Smolders, N.J. Pulsford

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

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This paper discusses the design and optimization of high-Q Bulk-Acoustic-Wave resonators using a Pt/Ta2O5/SiO2 reflector stack. It can be shown that by properly designing the reflector stack and boundary conditions, large performance improvements can be realized. In this paper the characterization and design of the reflector stack is described and its results are presented.

Originele taal-2	Engels
Titel	Proceedings of the 2007 IEEE/MTT-S International Microwave Symposium, 3-8 June 2007, Honolulu, Hawai
Plaats van productie	Piscataway
Uitgeverij	Institute of Electrical and Electronics Engineers
Pagina's	2047-2050
DOI's	https://doi.org/10.1109/MWSYM.2007.380253
Status	Gepubliceerd - 2007
Evenement	conference; IEEE MTT Symposium 2007, Honolulu - Duur: 1 jan. 2007 → …

Congres

Congres	conference; IEEE MTT Symposium 2007, Honolulu
Periode	1/01/07 → …
Ander	IEEE MTT Symposium 2007, Honolulu

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Lobeek, J. W., Strijbos, R. C., Jansman, A., Xin Li, N., Smolders, A. B., & Pulsford, N. J. (2007). High-Q BAW resonator on Pt/Ta2O5/SiO2 based reflector stack. In Proceedings of the 2007 IEEE/MTT-S International Microwave Symposium, 3-8 June 2007, Honolulu, Hawai (blz. 2047-2050). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/MWSYM.2007.380253

@inproceedings{9d320cfbf9e840738227e2e5cc2026f9,

title = "High-Q BAW resonator on Pt/Ta2O5/SiO2 based reflector stack",

abstract = "This paper discusses the design and optimization of high-Q Bulk-Acoustic-Wave resonators using a Pt/Ta2O5/SiO2 reflector stack. It can be shown that by properly designing the reflector stack and boundary conditions, large performance improvements can be realized. In this paper the characterization and design of the reflector stack is described and its results are presented.",

author = "J.W. Lobeek and R.C. Strijbos and A. Jansman and {Xin Li}, N. and A.B. Smolders and N.J. Pulsford",

year = "2007",

doi = "10.1109/MWSYM.2007.380253",

language = "English",

pages = "2047--2050",

booktitle = "Proceedings of the 2007 IEEE/MTT-S International Microwave Symposium, 3-8 June 2007, Honolulu, Hawai",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "conference; IEEE MTT Symposium 2007, Honolulu ; Conference date: 01-01-2007",

}

Lobeek, JW, Strijbos, RC, Jansman, A, Xin Li, N, Smolders, AB & Pulsford, NJ 2007, High-Q BAW resonator on Pt/Ta2O5/SiO2 based reflector stack. in Proceedings of the 2007 IEEE/MTT-S International Microwave Symposium, 3-8 June 2007, Honolulu, Hawai. Institute of Electrical and Electronics Engineers, Piscataway, blz. 2047-2050, conference; IEEE MTT Symposium 2007, Honolulu, 1/01/07. https://doi.org/10.1109/MWSYM.2007.380253

High-Q BAW resonator on Pt/Ta2O5/SiO2 based reflector stack. / Lobeek, J.W.; Strijbos, R.C.; Jansman, A. et al.
Proceedings of the 2007 IEEE/MTT-S International Microwave Symposium, 3-8 June 2007, Honolulu, Hawai. Piscataway: Institute of Electrical and Electronics Engineers, 2007. blz. 2047-2050.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

TY - GEN

T1 - High-Q BAW resonator on Pt/Ta2O5/SiO2 based reflector stack

AU - Lobeek, J.W.

AU - Strijbos, R.C.

AU - Jansman, A.

AU - Xin Li, N.

AU - Smolders, A.B.

AU - Pulsford, N.J.

PY - 2007

Y1 - 2007

N2 - This paper discusses the design and optimization of high-Q Bulk-Acoustic-Wave resonators using a Pt/Ta2O5/SiO2 reflector stack. It can be shown that by properly designing the reflector stack and boundary conditions, large performance improvements can be realized. In this paper the characterization and design of the reflector stack is described and its results are presented.

AB - This paper discusses the design and optimization of high-Q Bulk-Acoustic-Wave resonators using a Pt/Ta2O5/SiO2 reflector stack. It can be shown that by properly designing the reflector stack and boundary conditions, large performance improvements can be realized. In this paper the characterization and design of the reflector stack is described and its results are presented.

U2 - 10.1109/MWSYM.2007.380253

DO - 10.1109/MWSYM.2007.380253

M3 - Conference contribution

SP - 2047

EP - 2050

BT - Proceedings of the 2007 IEEE/MTT-S International Microwave Symposium, 3-8 June 2007, Honolulu, Hawai

PB - Institute of Electrical and Electronics Engineers

CY - Piscataway

T2 - conference; IEEE MTT Symposium 2007, Honolulu

Y2 - 1 January 2007

ER -

High-Q BAW resonator on Pt/Ta2O5/SiO2 based reflector stack

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