High-Q BAW resonator on Pt/Ta2O5/SiO2 based reflector stack

J.W. Lobeek, R.C. Strijbos, A. Jansman, N. Xin Li, A.B. Smolders, N.J. Pulsford

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

18 Citaten (Scopus)
1 Downloads (Pure)


This paper discusses the design and optimization of high-Q Bulk-Acoustic-Wave resonators using a Pt/Ta2O5/SiO2 reflector stack. It can be shown that by properly designing the reflector stack and boundary conditions, large performance improvements can be realized. In this paper the characterization and design of the reflector stack is described and its results are presented.
Originele taal-2Engels
TitelProceedings of the 2007 IEEE/MTT-S International Microwave Symposium, 3-8 June 2007, Honolulu, Hawai
Plaats van productiePiscataway
UitgeverijInstitute of Electrical and Electronics Engineers
StatusGepubliceerd - 2007
Evenementconference; IEEE MTT Symposium 2007, Honolulu -
Duur: 1 jan. 2007 → …


Congresconference; IEEE MTT Symposium 2007, Honolulu
Periode1/01/07 → …
AnderIEEE MTT Symposium 2007, Honolulu


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