High-performance integrated mid-infrared filter arrays

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Samenvatting

A static filter array is developed based on Fabry–Perot cavities operating in the mid-infrared range from 2 to 4.5 µm, matching the absorption region of several gases relevant for air quality monitoring. The filters include two distributed Bragg reflectors and a high-index tuning element with varying thickness in between. The filters display high peak transmittance (>80%) and controllable peak width. The robustness, ease of fabrication and the possibility to tune the optical response to a specific application make the integrated filter arrays suitable for compact sensing systems.
Originele taal-2Engels
Pagina's (van-tot)884-886
Aantal pagina's3
TijdschriftElectronics Letters
Volume58
Nummer van het tijdschrift23
Vroegere onlinedatum3 okt. 2022
DOI's
StatusGepubliceerd - nov. 2022

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