High performance beyond-rigid-body control of next-generation Flexible Stages

T.A.E. Oomen; R.M.A. Herpen, van; O.H. Bosgra; M.M.J. Wal, van de

High performance beyond-rigid-body control of next-generation Flexible Stages

T.A.E. Oomen, R.M.A. Herpen, van, O.H. Bosgra, M.M.J. Wal, van de

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic

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Originele taal-2	Engels
Titel	Proceedings of the 10th Philips Conference on Applications of Control Technology, February 3-4, 2009, Hilvarenbeek, The Netherlands
Pagina's	135-136
Status	Gepubliceerd - 2009

Citeer dit

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title = "High performance beyond-rigid-body control of next-generation Flexible Stages",

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High performance beyond-rigid-body control of next-generation Flexible Stages. / Oomen, T.A.E.; Herpen, van, R.M.A.; Bosgra, O.H. et al.

Proceedings of the 10th Philips Conference on Applications of Control Technology, February 3-4, 2009, Hilvarenbeek, The Netherlands. 2009. blz. 135-136.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic

TY - GEN

T1 - High performance beyond-rigid-body control of next-generation Flexible Stages

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AU - Bosgra, O.H.

AU - Wal, van de, M.M.J.

PY - 2009

Y1 - 2009

M3 - Conference contribution

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BT - Proceedings of the 10th Philips Conference on Applications of Control Technology, February 3-4, 2009, Hilvarenbeek, The Netherlands

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