Growth, phase and doping control in ZnO and In2O3 thin films prepared by atomic layer deposition

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Originele taal-2	Engels
Kwalificatie	Doctor in de Filosofie
Toekennende instantie	Applied Physics and Science Education
Begeleider(s)/adviseur	Kessels, W.M.M. (Erwin), Promotor Roozeboom, Fred, Promotor Verheijen, Marcel A., Co-Promotor
Datum van toekenning	22 jun. 2016
Plaats van publicatie	Eindhoven
Uitgever	Technische Universiteit Eindhoven
Gedrukte ISBN's	978-90-386-4089-1
Status	Gepubliceerd - 22 jun. 2016

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@phdthesis{29b7f5261d8a4b03a25f15adfe3a515c,

title = "Growth, phase and doping control in ZnO and In2O3 thin films prepared by atomic layer deposition",

author = "Y. Wu",

note = "Proefschrift",

year = "2016",

month = jun,

day = "22",

language = "English",

isbn = "978-90-386-4089-1",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}