High throughput requirements on high-precision manufacturing systems lead to a situation where the flexible dynamics hamper the performance at the positions of interest. Since these points are typically not measured directly, high performance local control of measured positions may lead to deteriorated performance due to internal deformations. A possible solution is to employ a control strategy which ensures that the desired rigid body motion is achieved, without exciting the parasitic flexible dynamics. In this paper, a feedforward controller design procedure is developed that achieves this type of global performance, which in turn leads to increased performance at the unmeasured positions of interest. The proposed method is applied to an experimental wafer stage showing that the proposed approach indeed leads to superior results with respect to the traditional local control approach.
|Nummer van het tijdschrift||1|
|Status||Gepubliceerd - 1 jul 2017|
|Evenement||20th World Congress of the International Federation of Automatic Control (IFAC 2017 World Congress) - Toulouse, Frankrijk|
Duur: 9 jul 2017 → 14 jul 2017