Generating cycle time-throughput curves using effective process time based aggregate modeling

C.P.L. Veeger, L.F.P. Etman, J. Herk, van, J.E. Rooda

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10 Citaties (Scopus)

Uittreksel

In semiconductor manufacturing, cycle time-throughput(CT-TH) curves are often used for planning purposes.To generate CT-TH curves, detailed simulation models or analytical queueing approximations may be used. Detailed models require much development time and computational effort. On the other hand, analytical models, such as the popular closed-form G/G/m queueing expression, may not be sufficiently accurate, inparticular for integrated processing equipment that have wafers of more than one lot in process. Recently, an aggregate simulation model representation ofworkstations with integrated processing equipment has been proposed. This aggregate model is a G=G=m type of system with a workload-dependent process time distribution, which is obtained from lot arrival and departure events. This paper presents a first proof of concept of the method in semiconductor practice. We develop the required extensions to generate CT-THcurves for workstations in a semiconductor manufacturing environment where usually only a limited amount of arrival and departure data is available. We present a simulation and an industry case to illustrate the proposed method.
TaalEngels
Pagina's517-526
TijdschriftIEEE Transactions on Semiconductor Manufacturing
Volume23
Nummer van het tijdschrift4
DOI's
StatusGepubliceerd - 2010

Vingerafdruk

Throughput
cycles
curves
Semiconductor materials
arrivals
manufacturing
Processing
simulation
workstations
Analytical models
planning
Planning
industries
wafers
Industry
approximation

Citeer dit

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Generating cycle time-throughput curves using effective process time based aggregate modeling. / Veeger, C.P.L.; Etman, L.F.P.; Herk, van, J.; Rooda, J.E.

In: IEEE Transactions on Semiconductor Manufacturing, Vol. 23, Nr. 4, 2010, blz. 517-526.

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

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AB - In semiconductor manufacturing, cycle time-throughput(CT-TH) curves are often used for planning purposes.To generate CT-TH curves, detailed simulation models or analytical queueing approximations may be used. Detailed models require much development time and computational effort. On the other hand, analytical models, such as the popular closed-form G/G/m queueing expression, may not be sufficiently accurate, inparticular for integrated processing equipment that have wafers of more than one lot in process. Recently, an aggregate simulation model representation ofworkstations with integrated processing equipment has been proposed. This aggregate model is a G=G=m type of system with a workload-dependent process time distribution, which is obtained from lot arrival and departure events. This paper presents a first proof of concept of the method in semiconductor practice. We develop the required extensions to generate CT-THcurves for workstations in a semiconductor manufacturing environment where usually only a limited amount of arrival and departure data is available. We present a simulation and an industry case to illustrate the proposed method.

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