Gaussian Processes for Learning in Motion Control: Applied to Semiconductor Back-End Machines

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Originele taal-2	Engels
Kwalificatie	Doctor in de Filosofie
Toekennende instantie	Mechanical Engineering
Begeleider(s)/adviseur	Oomen, Tom A.E., Promotor Portegies, Jim W., Co-Promotor
Datum van toekenning	3 jul. 2024
Plaats van publicatie	Eindhoven
Uitgever	Eindhoven University of Technology
Gedrukte ISBN's	978-90-386-6062-2
Status	Gepubliceerd - 3 jul. 2024

Proefschrift.

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@phdthesis{6291a888e4d0404b9b87e482c15b395b,

title = "Gaussian Processes for Learning in Motion Control: Applied to Semiconductor Back-End Machines",

author = "Poot, {Maurice Mathias}",

note = "Proefschrift.",

year = "2024",

month = jul,

day = "3",

language = "English",

isbn = "978-90-386-6062-2",

publisher = "Eindhoven University of Technology",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Mechanical Engineering",

}