Flying capacitor resonant pole inverter applying five voltage levels

Onderzoeksoutput: Bijdrage aan congresPoster

Uittreksel

Fast-moving high precision stages in lithographic equipment require power amplifiers with high output power and high precision output current generation capabilities. In the past, the increasing demand for more output power has been fulfilled mostly by increasing output current, which increases the thermal load on amplifiers, interconnections and actuators. In order to increase the output power when the available rms current is limited, the operating voltage of the system needs to be increased. This imposes a new set of challenges for the power amplifier, as reliable fast switching devices are not available with high blocking voltages.
Originele taal-2Engels
StatusGepubliceerd - 4 okt 2017
Evenement9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017) - Cincinnati, Verenigde Staten van Amerika
Duur: 1 okt 20175 okt 2017
Congresnummer: 9
http://www.ieee-ecce.org/2017

Congres

Congres9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017)
Verkorte titelECCE 2017
LandVerenigde Staten van Amerika
StadCincinnati
Periode1/10/175/10/17
Internet adres

Vingerafdruk

Power amplifiers
Poles
Capacitors
Electric potential
Thermal load
Actuators

Citeer dit

Settels, S. J., Duarte, J. L., van Duivenbode, J., & Lomonova, E. A. (2017). Flying capacitor resonant pole inverter applying five voltage levels. Postersessie gepresenteerd op 9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017), Cincinnati, Verenigde Staten van Amerika.
Settels, S.J. ; Duarte, J.L. ; van Duivenbode, J. ; Lomonova, E.A. / Flying capacitor resonant pole inverter applying five voltage levels. Postersessie gepresenteerd op 9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017), Cincinnati, Verenigde Staten van Amerika.
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Settels, SJ, Duarte, JL, van Duivenbode, J & Lomonova, EA 2017, 'Flying capacitor resonant pole inverter applying five voltage levels', 9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017), Cincinnati, Verenigde Staten van Amerika, 1/10/17 - 5/10/17.

Flying capacitor resonant pole inverter applying five voltage levels. / Settels, S.J.; Duarte, J.L.; van Duivenbode, J.; Lomonova, E.A.

2017. Postersessie gepresenteerd op 9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017), Cincinnati, Verenigde Staten van Amerika.

Onderzoeksoutput: Bijdrage aan congresPoster

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T1 - Flying capacitor resonant pole inverter applying five voltage levels

AU - Settels, S.J.

AU - Duarte, J.L.

AU - van Duivenbode, J.

AU - Lomonova, E.A.

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Y1 - 2017/10/4

N2 - Fast-moving high precision stages in lithographic equipment require power amplifiers with high output power and high precision output current generation capabilities. In the past, the increasing demand for more output power has been fulfilled mostly by increasing output current, which increases the thermal load on amplifiers, interconnections and actuators. In order to increase the output power when the available rms current is limited, the operating voltage of the system needs to be increased. This imposes a new set of challenges for the power amplifier, as reliable fast switching devices are not available with high blocking voltages.

AB - Fast-moving high precision stages in lithographic equipment require power amplifiers with high output power and high precision output current generation capabilities. In the past, the increasing demand for more output power has been fulfilled mostly by increasing output current, which increases the thermal load on amplifiers, interconnections and actuators. In order to increase the output power when the available rms current is limited, the operating voltage of the system needs to be increased. This imposes a new set of challenges for the power amplifier, as reliable fast switching devices are not available with high blocking voltages.

M3 - Poster

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Settels SJ, Duarte JL, van Duivenbode J, Lomonova EA. Flying capacitor resonant pole inverter applying five voltage levels. 2017. Postersessie gepresenteerd op 9th Annual IEEE Energy Conversion Congress and Exposition (ECCE 2017), Cincinnati, Verenigde Staten van Amerika.