Flow and temperature dependence of particle formation in AR-Silane RF capacitively coupled plasmas

M. Sorokin, G.M.W. Kroesen, W.W. Stoffels

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic

Originele taal-2	Engels
Titel	Proceedings of the E-MRS Spring Meeting 2004, 24-28 May 2004, Strasbourg, France
Status	Gepubliceerd - 2004

Citeer dit

@inproceedings{932e2f37e8f6407eadc371930473a20f,

title = "Flow and temperature dependence of particle formation in AR-Silane RF capacitively coupled plasmas",

author = "M. Sorokin and G.M.W. Kroesen and W.W. Stoffels",

year = "2004",

language = "English",

booktitle = "Proceedings of the E-MRS Spring Meeting 2004, 24-28 May 2004, Strasbourg, France",

}