Flexible AMOLED display on polyethylene napthalate (PEN) foil with metal-oxide TFT backplane

Ashutosh Kumar Tripathi, Bas Van Der Putten, Jan Laurens Van Der Steen, Karin Tempelaars, Brian Cobb, Marc Ameys, Tung Huei Ke, Kris Myny, Soeren Steudel, Manoj Nag, Sarah Schols, Peter Vicca, Steve Smout, Jan Genoe, Paul Heremans, Iryna Yakimets, Gerwin Gelinck

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Samenvatting

We present a top emitting monochrome AMOLED display with 85dpi resolution using an amorphous Indium-Gallium-Zinc-Oxide (IGZO) TFT backplane on PEN-foil. Maximum processing temperature was limited to 150 °C in order to ensure an overlay accuracy < 3μm on PEN foil. The backplane process flow is based on a 7 mask photolithography process that yields a final mobility of the IGZO TFTs of ∼ 13 cm2A/s.

Originele taal-2Engels
TitelSociety for Information Display - 19th International Display Workshops 2012, IDW/AD 2012
Pagina's1782-1785
Aantal pagina's4
Volume3
StatusGepubliceerd - 1 dec 2012
Evenement19th International Display Workshops in Conjunction with Asia Display (IDW 2012) - Kyoto, Japan
Duur: 4 dec 20127 dec 2012
Congresnummer: 19

Congres

Congres19th International Display Workshops in Conjunction with Asia Display (IDW 2012)
Verkorte titelIDW 2012
Land/RegioJapan
StadKyoto
Periode4/12/127/12/12

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