Feedforward Control using Gaussian Processes for Semiconductor Manufacturing Equipment

M.M. Poot; Dragan Kostic; Jacobus W. Portegies; Tom A.E. Oomen

Feedforward Control using Gaussian Processes for Semiconductor Manufacturing Equipment

Onderzoeksoutput: Bijdrage aan congres › Abstract › Academic

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Originele taal-2	Engels
Pagina's	51-52
Aantal pagina's	2
Status	Gepubliceerd - 2023
Evenement	First JSPS-NWO Seminar Research Network on Learning in Machines : New Perspectives for Future Nanoscale Production - University of Tokyo, Tokyo, Japan Duur: 3 jul 2023 → 7 jul 2023

Seminarie

Seminarie	First JSPS-NWO Seminar Research Network on Learning in Machines
Land/Regio	Japan
Stad	Tokyo
Periode	3/07/23 → 7/07/23

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PootMauriceFinale auteursversie , 1,27 MBLicentie: CC BY-NC-ND

Citeer dit

@conference{3508931a24e8448cb7acc3be9e4ee9a9,

title = "Feedforward Control using Gaussian Processes for Semiconductor Manufacturing Equipment",

author = "M.M. Poot and Dragan Kostic and Portegies, \{Jacobus W.\} and Oomen, \{Tom A.E.\}",

year = "2023",

language = "English",

pages = "51--52",

note = "First JSPS-NWO Seminar Research Network on Learning in Machines<br/> : New Perspectives for Future Nanoscale Production ; Conference date: 03-07-2023 Through 07-07-2023",

}