Feedforward Control using Gaussian Processes for Semiconductor Manufacturing Equipment

Onderzoeksoutput: Bijdrage aan congresAbstractAcademic

129 Downloads (Pure)
Originele taal-2Engels
Pagina's51-52
Aantal pagina's2
StatusGepubliceerd - 2023
EvenementFirst JSPS-NWO Seminar Research Network on Learning in Machines
: New Perspectives for Future Nanoscale Production
- University of Tokyo, Tokyo, Japan
Duur: 3 jul. 20237 jul. 2023

Seminarie

SeminarieFirst JSPS-NWO Seminar Research Network on Learning in Machines
Land/RegioJapan
StadTokyo
Periode3/07/237/07/23

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