Fault Diagnosis for Uncertain Systems in Closed Loop: Applied to Semiconductor Equipment

Onderzoeksoutput: Scriptie › Dissertatie 1 (Onderzoek TU/e / Promotie TU/e)

232 Downloads (Pure)

Originele taal-2	Engels
Kwalificatie	Doctor in de Filosofie
Toekennende instantie	Mechanical Engineering
Begeleider(s)/adviseur	Oomen, Tom A.E., Promotor Heemels, W.P.M.H. (Maurice), Promotor
Datum van toekenning	4 okt. 2024
Plaats van publicatie	Eindhoven
Uitgever	Eindhoven University of Technology
Gedrukte ISBN's	978-90-386-6146-9
Status	Gepubliceerd - 4 okt. 2024

Proefschrift.

Toegang tot document

@phdthesis{9211c3b466b848358e02d4b9bb93fa40,

title = "Fault Diagnosis for Uncertain Systems in Closed Loop: Applied to Semiconductor Equipment",

author = "Classens, {Koen Hendrik Johan}",

note = "Proefschrift.",

year = "2024",

month = oct,

day = "4",

language = "English",

isbn = "978-90-386-6146-9",

publisher = "Eindhoven University of Technology",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Mechanical Engineering",

}