Fast plasma deposition with the thermal plasma expansion technique

M.C.M. Sanden, van de, D.C. Schram, J.W.A.M. Gielen, A.J.M. Buuron, G.J. Meeusen, R.J. Severens

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Originele taal-2Engels
TitelProceedings of the eighth Gaseous Electronics Meeting, February 7-10, 1994, Canberra, Australia
StatusGepubliceerd - 1994
Evenement8th Gaseous Electronics Meeting (GEN 1994), February 7-10, 1994, Canberra, ACT, Australia - Australian National Library, Canberra, Australië
Duur: 7 feb 199410 feb 1994

Congres

Congres8th Gaseous Electronics Meeting (GEN 1994), February 7-10, 1994, Canberra, ACT, Australia
LandAustralië
StadCanberra
Periode7/02/9410/02/94
AnderGaseous Electronics Meeting

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