Fast deposition of amorphous carbon films by an expanding cascaded arc plasma jet

A.J.M. Buuron, M.C.M. Sanden, van de, W.J. Ooij, van, R.M.A. Driessens, D.C. Schram

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@article{712932f0fd8e41faa906d432dd322bf2,

title = "Fast deposition of amorphous carbon films by an expanding cascaded arc plasma jet",

author = "A.J.M. Buuron and {Sanden, van de}, M.C.M. and {Ooij, van}, W.J. and R.M.A. Driessens and D.C. Schram",

year = "1995",

doi = "10.1063/1.360637",

language = "English",

volume = "78",

pages = "528--540",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "1",

}

TY - JOUR

T1 - Fast deposition of amorphous carbon films by an expanding cascaded arc plasma jet

AU - Buuron, A.J.M.

AU - Sanden, van de, M.C.M.

AU - Ooij, van, W.J.

AU - Driessens, R.M.A.

AU - Schram, D.C.

PY - 1995

Y1 - 1995

U2 - 10.1063/1.360637

DO - 10.1063/1.360637

M3 - Article

SN - 0021-8979

VL - 78

SP - 528

EP - 540

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 1

ER -