Fast deposition of a-C:H : increasing quality with increasing growth rate

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Originele taal-2	Engels
Titel	AVS, American Vacuum Society : 43rd national symposium, Philadelphia, October 14-18, 1996 : Abstracts
Pagina's	167
Status	Gepubliceerd - 1996

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@inproceedings{f7845ba06f1041ca81ec3913a29ce234,

title = "Fast deposition of a-C:H : increasing quality with increasing growth rate",

author = "J.W.A.M. Gielen and W.M.M. Kessels and \{Graaf, de\}, A. and J.L. Longueville and \{Sanden, van de\}, M.C.M. and D.C. Schram",

year = "1996",

language = "English",

pages = "167",

booktitle = "AVS, American Vacuum Society : 43rd national symposium, Philadelphia, October 14-18, 1996 : Abstracts",

}

TY - GEN

T1 - Fast deposition of a-C:H : increasing quality with increasing growth rate

AU - Gielen, J.W.A.M.

AU - Kessels, W.M.M.

AU - Graaf, de, A.

AU - Longueville, J.L.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1996

Y1 - 1996

M3 - Conference contribution

SP - 167

BT - AVS, American Vacuum Society : 43rd national symposium, Philadelphia, October 14-18, 1996 : Abstracts

ER -