Fabrication technology of metal-cavity nanolasers in III-V membranes on silicon

V.M. Dolores Calzadilla, C.T.T. Geluk, T. Vries, de, B. Smalbrugge, P.J. Veldhoven, van, H.P.M.M. Ambrosius, D. Heiss, A. Fiore, M.K. Smit

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

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Samenvatting

Electrically pumped metal-cavity nanolasers in III-V semiconductors are promising for their application in optical interconnects, where high integration density and low optical powers are required. They offer a low threshold current and excellent cooling properties due to the metal encapsulation. In this contribution, an overview about the technology required for the fabrication of a nanolaser coupled to an InP-membrane waveguide on silicon is presented. A variety of techniques are used including electron-beam lithography, dry and wet etching, as well as deposition of dielectrics and metals. The technological challenges to fabricate such a complex nanostructure are also discussed.
Originele taal-2Engels
TitelProceedings of the 18th Annual Symposium of the IEEE Photonics Benelux Chapter, 25-26 November 2013, Eindhoven, The Netherlands
Plaats van productieEindhoven
UitgeverijTechnische Universiteit Eindhoven
Pagina's243-246
ISBN van geprinte versie978-90-386-3512-5
StatusGepubliceerd - 2013
Evenement18th Annual Symposium of the IEEE Photonics Benelux Chapter - Eindhoven, Nederland
Duur: 25 nov 201326 nov 2013
http://www.photonics-benelux.org/symp13/

Congres

Congres18th Annual Symposium of the IEEE Photonics Benelux Chapter
LandNederland
StadEindhoven
Periode25/11/1326/11/13
Ander18th Annual Symposium of the IEEE Photonics Society Benelux Chapter, Eindhoven, The Netherlands
Internet adres

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