Fabrication technology of a slot waveguide modulator in InP Membranes on Silicon (IMOS)

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

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Samenvatting

For the InP Membranes On Silicon (IMOS) platform [1], we developed an electrooptic modulator based on a slot-waveguide with a high nonlinear polymer. A variety of fabrication techniques are used, including electron beam lithography (EBL), optical lithography (OL), dry etching and metallization. The fabrication of such modulator requires a complex fabrication process. In this work we present and discuss the most important fabrication steps.
Originele taal-2Engels
Titel18th European Conference on Integrated Optics (ECIO 2016), 18-20 May 2016, Warsaw, Poland
Pagina's223/224
Aantal pagina's2
StatusGepubliceerd - 21 mei 2016
Evenement18th European Conference on Integrated Optics (ECIO 2016) - Warsaw University of Technology, Warsaw, Polen
Duur: 18 mei 201620 mei 2016
Congresnummer: 18
http://ecio2016.imio.pw.edu.pl/

Congres

Congres18th European Conference on Integrated Optics (ECIO 2016)
Verkorte titelECIO 2016
Land/RegioPolen
StadWarsaw
Periode18/05/1620/05/16
Internet adres

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