Fabrication of pure gold nanostructures by electron beam induced deposition with Au(C0)CI precusor: deposition characteristics and primary beam scattering effects

J.J.L. Mulders; Marcel Veerhoek; E.G.T. Bosch; P.H.F. Trompenaars

doi:10.1088/0022-3727/45/47/475301

Fabrication of pure gold nanostructures by electron beam induced deposition with Au(C0)CI precusor: deposition characteristics and primary beam scattering effects

J.J.L. Mulders, Marcel Veerhoek, E.G.T. Bosch, P.H.F. Trompenaars

Onderzoeksoutput: Bijdrage aan tijdschrift › Tijdschriftartikel › Academic › peer review

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In the search for a direct write, high-purity electron beam induced deposition (EBID) process, a new gold precursor that is commonly available is investigated. This precursor, Au(CO)Cl, can indeed be used to produce a high-purity golden nanostructure (>95 at% Au), at a wide variety of electron beam parameters. The use of a mass spectrometer to determine the components of the actual precursor vapour showed that the Au(CO)Cl density in the vapour is very low (estimated at

Originele taal-2	Engels
Artikelnummer	47301
Pagina's (van-tot)	47301
Aantal pagina's	7
Tijdschrift	Journal of Physics D: Applied Physics
Volume	45
Nummer van het tijdschrift	47
DOI's	https://doi.org/10.1088/0022-3727/45/47/475301
Status	Gepubliceerd - 2012

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10.1088/0022-3727/45/47/475301

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abstract = "In the search for a direct write, high-purity electron beam induced deposition (EBID) process, a new gold precursor that is commonly available is investigated. This precursor, Au(CO)Cl, can indeed be used to produce a high-purity golden nanostructure (>95 at% Au), at a wide variety of electron beam parameters. The use of a mass spectrometer to determine the components of the actual precursor vapour showed that the Au(CO)Cl density in the vapour is very low (estimated at",

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Fabrication of pure gold nanostructures by electron beam induced deposition with Au(C0)CI precusor: deposition characteristics and primary beam scattering effects. / Mulders, J.J.L.; Veerhoek, Marcel; Bosch, E.G.T. et al.

In: Journal of Physics D: Applied Physics, Vol. 45, Nr. 47, 47301, 2012, blz. 47301.

Onderzoeksoutput: Bijdrage aan tijdschrift › Tijdschriftartikel › Academic › peer review

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AU - Trompenaars, P.H.F.

PY - 2012

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Fabrication of pure gold nanostructures by electron beam induced deposition with Au(C0)CI precusor: deposition characteristics and primary beam scattering effects

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