An extension of our double Gaussian PROZA96 correction program for EPMA is presented, which can handle non-perpendicular incidence of the electron beam. The description of the changes in the primary intensity generated in the specimen and of the changes in the integral of ( z) with tilt are taken from the literature. The extreme changes in the shape of ( z) are modeled by a gradual transition of the original double Gaussian shape at zero tilt, through a mixed Gaussian/single-exponential (for tilt angles up to 60°), to finally a mixed Gaussian/double-exponential shape (for tilt angles exceeding 60°). The left-hand (rising) branch of ( z) is assumed to retain its original Gaussian form during tilting. Tests on the limited data available in the literature have shown that the performance of this new extended model is very promising. Copyright © 2001 John Wiley & Sons, Ltd.