Exploring the temporally resolved electron density evolution in extreme ultra-violet induced plasmas

R.M. Horst, van der, J. Beckers, S. Nijdam, G.M.W. Kroesen

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Samenvatting

We measured the electron density in an extreme ultra-violet (EUV) induced plasma. This is achieved in a low-pressure argon plasma by using a method called microwave cavity resonance spectroscopy. The measured electron density just after the EUV pulse is 2.6 × 1016 m-3. This is in good agreement with a theoretical prediction from photo-ionization, which yields a density of 4.5 × 1016 m-3. After the EUV pulse the density slightly increases due to electron impact ionization. The plasma (i.e. electron density) decays in tens of microseconds.
Originele taal-2Engels
Pagina's (van-tot)302001-1/4
Aantal pagina's5
TijdschriftJournal of Physics D: Applied Physics
Volume47
Nummer van het tijdschrift30
DOI's
StatusGepubliceerd - 30 jul 2014

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