Two alternative detector types have been studied for use in the Eindhoven Scanning Ion Microprobe set-up. First, the applicability of a Charge Coupled Device (CCD) system for X-ray spectroscopy has been explored. Second, some properties of the SiTek type 1L30 Position Sensitive Detector (PSD) for charged-particle spectroscopy have been studied. A literature survey shows that excellent X-ray spectroscopy with a CCD system is feasible, particularly with a deep-depletion backside-illuminated CCD and low speed read-out. If, however, high-speed CCD read-out is required, such as for scanning microprobe experiments, a CCD system cannot be used for spectroscopy due to excess read-out noise. For the PSD, noise theory calculations are presented, which result in a noise shaping time for optimal energy and position resolution. In practice, however, a much longer time is needed to obtain sufficient energy and position linearity. Characterization measurements of the PSD using our 4 MeV He+ microprobe are also described. A position resolution of 0.47 mm and a position linearity of better than 0.15% detector length are found. In addition, an energy linearity better than 0.3% and an energy resolution of 36 keV are measured. The latter will have to be improved, to make the PSD suitable for charged-particle spectroscopy applications.
|Tijdschrift||Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms|
|Nummer van het tijdschrift||1-4|
|Status||Gepubliceerd - 1998|