Exploiting additional actuators and sensors for nano-positioning robust motion control

R.M.A. van Herpen; T.A.E. Oomen; E.J.G.J. Kikken; M.M.J. van de Wal; W.H.T.M. Aangenent; M. Steinbuch

doi:10.1109/ACC.2014.6858927

Exploiting additional actuators and sensors for nano-positioning robust motion control

R.M.A. van Herpen, T.A.E. Oomen, E.J.G.J. Kikken, M.M.J. van de Wal, W.H.T.M. Aangenent, M. Steinbuch

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

11 Citaten (Scopus)

Samenvatting

The ongoing need for miniaturization and an increase of throughput in IC-manufacturing is obstructed by performance limitations in motion control of nano-positioning wafer stages. These limitations are imposed by flexible dynamical behavior, associated with structural deformations of the nano-positioning stages. The aim of this research is to investigate limits on achievable performance in a conventional control configuration and to mitigate these limits through the use of additional actuators and sensors. To this end, a systematic framework for control design using additional actuators and sensors in the generalized plant configuration is presented, which leads to a well-posed H8-control optimization problem that extends conventional design approaches in a natural way and exploits physical insight to address structural deformations in weighting filter design. Through an experimental confrontation of the design framework with a prototype next-generation nano-positioning motion system, successful performance enhancement beyond the conventional limits is demonstrated.

Originele taal-2	Engels
Titel	Proceedings of the 2014 American Control Conference, 4-6 June 2014, Portland, Oregon
Plaats van productie	Piscataway
Uitgeverij	Institute of Electrical and Electronics Engineers
Pagina's	984-990
ISBN van geprinte versie	978-1-4799-3272-6
DOI's	https://doi.org/10.1109/ACC.2014.6858927
Status	Gepubliceerd - 2014
Evenement	2014 American Control Conference (ACC 2014), June 4-6, 2014, Portland, OR, USA - Hilton Portland & Executive Tower , Portland, OR, Verenigde Staten van Amerika Duur: 4 jun. 2014 → 6 jun. 2014 http://acc2014.a2c2.org/

Congres

Congres	2014 American Control Conference (ACC 2014), June 4-6, 2014, Portland, OR, USA
Verkorte titel	ACC 2014
Land/Regio	Verenigde Staten van Amerika
Stad	Portland, OR
Periode	4/06/14 → 6/06/14
Ander	2014 American Control Conference, Portland, OR
Internet adres	http://acc2014.a2c2.org/

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10.1109/ACC.2014.6858927

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van Herpen, R. M. A., Oomen, T. A. E., Kikken, E. J. G. J., van de Wal, M. M. J., Aangenent, W. H. T. M., & Steinbuch, M. (2014). Exploiting additional actuators and sensors for nano-positioning robust motion control. In Proceedings of the 2014 American Control Conference, 4-6 June 2014, Portland, Oregon (blz. 984-990). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/ACC.2014.6858927

@inproceedings{20a74fb300d24fd8842b29a883b2bb6d,

title = "Exploiting additional actuators and sensors for nano-positioning robust motion control",

abstract = "The ongoing need for miniaturization and an increase of throughput in IC-manufacturing is obstructed by performance limitations in motion control of nano-positioning wafer stages. These limitations are imposed by flexible dynamical behavior, associated with structural deformations of the nano-positioning stages. The aim of this research is to investigate limits on achievable performance in a conventional control configuration and to mitigate these limits through the use of additional actuators and sensors. To this end, a systematic framework for control design using additional actuators and sensors in the generalized plant configuration is presented, which leads to a well-posed H8-control optimization problem that extends conventional design approaches in a natural way and exploits physical insight to address structural deformations in weighting filter design. Through an experimental confrontation of the design framework with a prototype next-generation nano-positioning motion system, successful performance enhancement beyond the conventional limits is demonstrated.",

author = "{van Herpen}, R.M.A. and T.A.E. Oomen and E.J.G.J. Kikken and {van de Wal}, M.M.J. and W.H.T.M. Aangenent and M. Steinbuch",

year = "2014",

doi = "10.1109/ACC.2014.6858927",

language = "English",

isbn = "978-1-4799-3272-6",

pages = "984--990",

booktitle = "Proceedings of the 2014 American Control Conference, 4-6 June 2014, Portland, Oregon",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "2014 American Control Conference (ACC 2014), June 4-6, 2014, Portland, OR, USA, ACC 2014 ; Conference date: 04-06-2014 Through 06-06-2014",

url = "http://acc2014.a2c2.org/",

}

van Herpen, RMA, Oomen, TAE, Kikken, EJGJ, van de Wal, MMJ, Aangenent, WHTM & Steinbuch, M 2014, Exploiting additional actuators and sensors for nano-positioning robust motion control. in Proceedings of the 2014 American Control Conference, 4-6 June 2014, Portland, Oregon. Institute of Electrical and Electronics Engineers, Piscataway, blz. 984-990, 2014 American Control Conference (ACC 2014), June 4-6, 2014, Portland, OR, USA, Portland, OR, Verenigde Staten van Amerika, 4/06/14. https://doi.org/10.1109/ACC.2014.6858927

Exploiting additional actuators and sensors for nano-positioning robust motion control. / van Herpen, R.M.A.; Oomen, T.A.E.; Kikken, E.J.G.J. et al.
Proceedings of the 2014 American Control Conference, 4-6 June 2014, Portland, Oregon. Piscataway: Institute of Electrical and Electronics Engineers, 2014. blz. 984-990.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

TY - GEN

T1 - Exploiting additional actuators and sensors for nano-positioning robust motion control

AU - van Herpen, R.M.A.

AU - Oomen, T.A.E.

AU - Kikken, E.J.G.J.

AU - van de Wal, M.M.J.

AU - Aangenent, W.H.T.M.

AU - Steinbuch, M.

PY - 2014

Y1 - 2014

N2 - The ongoing need for miniaturization and an increase of throughput in IC-manufacturing is obstructed by performance limitations in motion control of nano-positioning wafer stages. These limitations are imposed by flexible dynamical behavior, associated with structural deformations of the nano-positioning stages. The aim of this research is to investigate limits on achievable performance in a conventional control configuration and to mitigate these limits through the use of additional actuators and sensors. To this end, a systematic framework for control design using additional actuators and sensors in the generalized plant configuration is presented, which leads to a well-posed H8-control optimization problem that extends conventional design approaches in a natural way and exploits physical insight to address structural deformations in weighting filter design. Through an experimental confrontation of the design framework with a prototype next-generation nano-positioning motion system, successful performance enhancement beyond the conventional limits is demonstrated.

AB - The ongoing need for miniaturization and an increase of throughput in IC-manufacturing is obstructed by performance limitations in motion control of nano-positioning wafer stages. These limitations are imposed by flexible dynamical behavior, associated with structural deformations of the nano-positioning stages. The aim of this research is to investigate limits on achievable performance in a conventional control configuration and to mitigate these limits through the use of additional actuators and sensors. To this end, a systematic framework for control design using additional actuators and sensors in the generalized plant configuration is presented, which leads to a well-posed H8-control optimization problem that extends conventional design approaches in a natural way and exploits physical insight to address structural deformations in weighting filter design. Through an experimental confrontation of the design framework with a prototype next-generation nano-positioning motion system, successful performance enhancement beyond the conventional limits is demonstrated.

U2 - 10.1109/ACC.2014.6858927

DO - 10.1109/ACC.2014.6858927

M3 - Conference contribution

SN - 978-1-4799-3272-6

SP - 984

EP - 990

BT - Proceedings of the 2014 American Control Conference, 4-6 June 2014, Portland, Oregon

PB - Institute of Electrical and Electronics Engineers

CY - Piscataway

T2 - 2014 American Control Conference (ACC 2014), June 4-6, 2014, Portland, OR, USA

Y2 - 4 June 2014 through 6 June 2014

ER -

van Herpen RMA, Oomen TAE, Kikken EJGJ, van de Wal MMJ, Aangenent WHTM, Steinbuch M. Exploiting additional actuators and sensors for nano-positioning robust motion control. In Proceedings of the 2014 American Control Conference, 4-6 June 2014, Portland, Oregon. Piscataway: Institute of Electrical and Electronics Engineers. 2014. blz. 984-990 doi: 10.1109/ACC.2014.6858927

Exploiting additional actuators and sensors for nano-positioning robust motion control

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