Experimental validation of a piezoelectric wafer stage concept combined with highly variable viscoelastic stiffness

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

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Originele taal-2	Engels
Titel	39th Annual Meeting of the American Society of Precision Engineering
Uitgeverij	American Society of Precision Engineering (ASPE)
Pagina's	21-25
Status	Gepubliceerd - 4 nov 2024
Evenement	39th Annual Meeting of the American Society for Precision Engineering, ASPE 2024 - The Westin Galleria Houston, Houston, Verenigde Staten van Amerika Duur: 5 nov 2024 → 8 nov 2024

Naam	2024 ASPE Annual Meeting
Volume	83

Congres	39th Annual Meeting of the American Society for Precision Engineering, ASPE 2024
Land/Regio	Verenigde Staten van Amerika
Stad	Houston
Periode	5/11/24 → 8/11/24

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de Bruijn, R. G. C., van de Wijdeven, J. J. M., & Vermeulen, J. P. M. B. (2024). Experimental validation of a piezoelectric wafer stage concept combined with highly variable viscoelastic stiffness. In 39th Annual Meeting of the American Society of Precision Engineering (blz. 21-25). (2024 ASPE Annual Meeting; Vol. 83). American Society of Precision Engineering (ASPE).

@inproceedings{48df1ad59481471082fea1b4a8d6f409,

title = "Experimental validation of a piezoelectric wafer stage concept combined with highly variable viscoelastic stiffness",

author = "\{de Bruijn\}, R.G.C. and \{van de Wijdeven\}, \{Jeroen J.M.\} and Vermeulen, \{J.P.M.B. (Hans)\}",

year = "2024",

month = nov,

day = "4",

language = "English",

series = "2024 ASPE Annual Meeting",

publisher = "American Society of Precision Engineering (ASPE)",

pages = "21--25",

booktitle = "39th Annual Meeting of the American Society of Precision Engineering",

note = "39th Annual Meeting of the American Society for Precision Engineering, ASPE 2024 ; Conference date: 05-11-2024 Through 08-11-2024",

}

de Bruijn, RGC, van de Wijdeven, JJM & Vermeulen, JPMB 2024, Experimental validation of a piezoelectric wafer stage concept combined with highly variable viscoelastic stiffness. in 39th Annual Meeting of the American Society of Precision Engineering. 2024 ASPE Annual Meeting, vol. 83, American Society of Precision Engineering (ASPE), blz. 21-25, 39th Annual Meeting of the American Society for Precision Engineering, ASPE 2024, Houston, Verenigde Staten van Amerika, 5/11/24.

Experimental validation of a piezoelectric wafer stage concept combined with highly variable viscoelastic stiffness. / de Bruijn, R.G.C.; van de Wijdeven, Jeroen J.M.; Vermeulen, J.P.M.B. (Hans).
39th Annual Meeting of the American Society of Precision Engineering. American Society of Precision Engineering (ASPE), 2024. blz. 21-25 (2024 ASPE Annual Meeting; Vol. 83).

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

TY - GEN

T1 - Experimental validation of a piezoelectric wafer stage concept combined with highly variable viscoelastic stiffness

AU - de Bruijn, R.G.C.

AU - van de Wijdeven, Jeroen J.M.

AU - Vermeulen, J.P.M.B. (Hans)

PY - 2024/11/4

Y1 - 2024/11/4

M3 - Conference contribution

T3 - 2024 ASPE Annual Meeting

SP - 21

EP - 25

BT - 39th Annual Meeting of the American Society of Precision Engineering

PB - American Society of Precision Engineering (ASPE)

T2 - 39th Annual Meeting of the American Society for Precision Engineering, ASPE 2024

Y2 - 5 November 2024 through 8 November 2024

ER -