Experimental validation of a piezoelectric wafer stage concept combined with highly variable viscoelastic stiffness

Onderzoeksoutput: Bijdrage aan congres › Paper › Academic

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Originele taal-2	Engels
Pagina's	21-25
Status	Gepubliceerd - 4 nov. 2024
Evenement	39th Annual Meeting of the American Society of Precision Engineering - The Westin Galleria Houston, Houston, Verenigde Staten van Amerika Duur: 4 nov. 2024 → 8 nov. 2024

Congres	39th Annual Meeting of the American Society of Precision Engineering
Land/Regio	Verenigde Staten van Amerika
Stad	Houston
Periode	4/11/24 → 8/11/24

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@conference{48df1ad59481471082fea1b4a8d6f409,

title = "Experimental validation of a piezoelectric wafer stage concept combined with highly variable viscoelastic stiffness",

author = "{de Bruijn}, R.G.C. and {van de Wijdeven}, {Jeroen J.M.} and Vermeulen, {J.P.M.B. (Hans)}",

year = "2024",

month = nov,

day = "4",

language = "English",

pages = "21--25",

note = "39th Annual Meeting of the American Society of Precision Engineering ; Conference date: 04-11-2024 Through 08-11-2024",

}

Experimental validation of a piezoelectric wafer stage concept combined with highly variable viscoelastic stiffness. / de Bruijn, R.G.C.; van de Wijdeven, Jeroen J.M.; Vermeulen, J.P.M.B. (Hans).
2024. 21-25 Paper gepresenteerd op 39th Annual Meeting of the American Society of Precision Engineering, Houston, Texas, Verenigde Staten van Amerika.

Onderzoeksoutput: Bijdrage aan congres › Paper › Academic

TY - CONF

T1 - Experimental validation of a piezoelectric wafer stage concept combined with highly variable viscoelastic stiffness

AU - de Bruijn, R.G.C.

AU - van de Wijdeven, Jeroen J.M.

AU - Vermeulen, J.P.M.B. (Hans)

PY - 2024/11/4

Y1 - 2024/11/4

M3 - Paper

SP - 21

EP - 25

T2 - 39th Annual Meeting of the American Society of Precision Engineering

Y2 - 4 November 2024 through 8 November 2024

ER -