Expanding plasma used for plasma deposition

G.M.W. Kroesen, C.J. Timmermans, D.C. Schram

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademic

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Originele taal-2Engels
TitelISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 2
RedacteurenK. Akashi, A. Kinbara
Plaats van productieTokyo
Pagina's1097-1099
StatusGepubliceerd - 1987
Evenement8th International Symposium on Plasma Chemistry (ISPC 8) - Tokyo, Japan
Duur: 31 aug 19874 sep 1987
Congresnummer: 8

Congres

Congres8th International Symposium on Plasma Chemistry (ISPC 8)
Verkorte titelISPC/Tokyo 1987
LandJapan
StadTokyo
Periode31/08/874/09/87

Citeer dit

Kroesen, G. M. W., Timmermans, C. J., & Schram, D. C. (1987). Expanding plasma used for plasma deposition. In K. Akashi, & A. Kinbara (editors), ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 2 (blz. 1097-1099). Tokyo.
Kroesen, G.M.W. ; Timmermans, C.J. ; Schram, D.C. / Expanding plasma used for plasma deposition. ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 2 . redacteur / K. Akashi ; A. Kinbara. Tokyo, 1987. blz. 1097-1099
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title = "Expanding plasma used for plasma deposition",
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year = "1987",
language = "English",
pages = "1097--1099",
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Kroesen, GMW, Timmermans, CJ & Schram, DC 1987, Expanding plasma used for plasma deposition. in K Akashi & A Kinbara (redactie), ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 2 . Tokyo, blz. 1097-1099, 8th International Symposium on Plasma Chemistry (ISPC 8), Tokyo, Japan, 31/08/87.

Expanding plasma used for plasma deposition. / Kroesen, G.M.W.; Timmermans, C.J.; Schram, D.C.

ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 2 . redactie / K. Akashi; A. Kinbara. Tokyo, 1987. blz. 1097-1099.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademic

TY - GEN

T1 - Expanding plasma used for plasma deposition

AU - Kroesen, G.M.W.

AU - Timmermans, C.J.

AU - Schram, D.C.

PY - 1987

Y1 - 1987

M3 - Conference contribution

SP - 1097

EP - 1099

BT - ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 2

A2 - Akashi, K.

A2 - Kinbara, A.

CY - Tokyo

ER -

Kroesen GMW, Timmermans CJ, Schram DC. Expanding plasma used for plasma deposition. In Akashi K, Kinbara A, redacteurs, ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 2 . Tokyo. 1987. blz. 1097-1099