Erratum: History of atomic layer deposition and its relationship with the American Vacuum Society (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (2013)31 (050818) DOI: 10.1116/1.4816548)
Gregory N. Parsons (Corresponding author), Jeffrey W. Elam, Steven M. George, Suvi Haukka, Hyeongtag Jeon, W. M.M. Kessels, Markku Leskelä, Paul Poodt, Mikko Ritala, Steven M. Rossnagel
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