Energy spread reduction using a laser-cooled ion source

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademic


High brightness ion beams are used in applications such as focused ion beam systems, the preferred tool to mill and deposit material on nanometer scale. The smallest achievable spot size of focused ion beam technology is currently limited by chromatic aberrations in the lens column due to the energy spread of the industry standard liquid metal ions source (LMIS).
Originele taal-2Engels
Titel13th ICIS International Conference on Ion Sources, Gatlinburg, Tennessee, USA, 21-25 September 2009
StatusGepubliceerd - 2009

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