TY - JOUR
T1 - Empirical and theoretical characterization of electrostatically driven MEMS structures with stress gradients
AU - De Coster, J.
AU - Tilmans, H.A.C.
AU - Toonder, den, J.M.J.
AU - van Beek, J.T.M.
AU - Rijks, T.G.S.M.
AU - Steeneken, P.G.
AU - Puers, R.
PY - 2005
Y1 - 2005
N2 - This paper investigates the influence of residual stress on the characteristics of electrostatic actuators. This is first done empirically by mechanical characterisation of a set of RF-MEMS switches with varying geometries. The mechanical measurements are performed on a Dektak surface profilometer. In addition, low-frequency electrical characterisation is performed. The measurement results allow for fine-tuning of the analytical relationship between pull-in voltage and geometrical parameters. This generally applicable method therefore reduces the need for more advanced but time-consuming electromechanical simulations to predict the electrostatic switching behaviour of a large range of (RF-)MEMS devices with various geometries. Next, an analytical formula is derived, relating the deformation of the actuator due to stress and stress gradients to the electrostatic pull-in voltage. The results obtained with this formula are in good agreement with the measurements.
AB - This paper investigates the influence of residual stress on the characteristics of electrostatic actuators. This is first done empirically by mechanical characterisation of a set of RF-MEMS switches with varying geometries. The mechanical measurements are performed on a Dektak surface profilometer. In addition, low-frequency electrical characterisation is performed. The measurement results allow for fine-tuning of the analytical relationship between pull-in voltage and geometrical parameters. This generally applicable method therefore reduces the need for more advanced but time-consuming electromechanical simulations to predict the electrostatic switching behaviour of a large range of (RF-)MEMS devices with various geometries. Next, an analytical formula is derived, relating the deformation of the actuator due to stress and stress gradients to the electrostatic pull-in voltage. The results obtained with this formula are in good agreement with the measurements.
U2 - 10.1016/j.sna.2005.03.075
DO - 10.1016/j.sna.2005.03.075
M3 - Article
SN - 0924-4247
VL - 123-124
SP - 555
EP - 562
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
ER -