Electron source, and charged-particle apparatus comprising such an electron source

N. Jonge, de (Uitvinder), E.P.A.M. Bakkers (Uitvinder), L.F. Feiner (Uitvinder), A.M. Calvosa (Uitvinder)

Onderzoeksoutput: OctrooiOctrooi-publicatie

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Samenvatting

The invention provides an electron source suitable for use in a charged-particle apparatus, in which source a beam of electrons can be extracted from an electrode that is subjected to at least one of an electric potential, thermal excitation and photonic excitation, whereby at least part of the electrode comprises semiconductor material having a conduction band that is quantized into discrete energy levels. Such a source enjoys a relatively low energy spread, typically much smaller than that of a Cold Field Emission Gun (CFEG). The semiconductor material may, for example, comprise a semiconductor nanowire including InAs and GaInAs.
Originele taal-2Engels
OctrooinummerUS7288773
StatusGepubliceerd - 30 okt 2007

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  • Citeer dit

    Jonge, de, N., Bakkers, E. P. A. M., Feiner, L. F., & Calvosa, A. M. (2007). Electron source, and charged-particle apparatus comprising such an electron source. (Octrooi Nr. US7288773).