Electron energy distribution in a RF excited CF4 plasma

P.M. Vallinga, T.J. Bisschops, F.J. Hoog, de

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Originele taal-2Engels
TitelProceedings of the 17th International Conference on Phenomena in Ionised Gases (XVII ICPIG 1985) 8-12 July 1985, Budapest, Hungary
RedacteurenJ.S. Bakos, Zsuzsa Sõrlei
Pagina'sE-13-333-335
StatusGepubliceerd - 1985
Evenement17th International Conference on Phenomena in Ionized Gases (ICPIG 1985), July 8-12, 1985, Budapest, Hungary - Budapest, Hongarije
Duur: 8 jul 198512 jul 1985

Congres

Congres17th International Conference on Phenomena in Ionized Gases (ICPIG 1985), July 8-12, 1985, Budapest, Hungary
Verkorte titelICPIG 1985
LandHongarije
StadBudapest
Periode8/07/8512/07/85
AnderInternational Conference on Phenomena in Ionised Gases (ICPIG)

Citeer dit