Electron energy distribution function close to the mode transition region in an inductively coupled gaseous electronics conference reference cell

S.V. Singh, P. Kempkes, H. Soltwisch

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

33 Citaten (Scopus)
211 Downloads (Pure)

Samenvatting

The electron energy distribution function (EEDF) in the E to H mode transition region of an inductively coupled argon discharge has been studied experimentally. The EEDF, which has a Maxwellian- or Druyvesteyn-like shape (depending on pressure) in both "pure" modes, shows a trend to a bi-Maxwellian shape in the vicinity of both the E to H and the H to E mode transitions. Moreover, the normalized electron energy probability functions closely before the E to H and the reverse H to E mode jumps are almost identical, indicating a similar power coupling at both transition points. ©2006 American Institute of Physics
Originele taal-2Engels
Artikelnummer161501
Pagina's (van-tot)161501-1/3
Aantal pagina's3
TijdschriftApplied Physics Letters
Volume89
Nummer van het tijdschrift16
DOI's
StatusGepubliceerd - 2006

Vingerafdruk

Duik in de onderzoeksthema's van 'Electron energy distribution function close to the mode transition region in an inductively coupled gaseous electronics conference reference cell'. Samen vormen ze een unieke vingerafdruk.

Citeer dit