Electron densities in an RF etch plasma

T.H.J. Bisschops, R.F. Flipsen, D.C. Schram

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademic

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Originele taal-2Engels
TitelISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1
RedacteurenK. Akashi, A. Kinbara
Plaats van productieTokyo
Pagina's620-624
StatusGepubliceerd - 1987

Citeer dit

Bisschops, T. H. J., Flipsen, R. F., & Schram, D. C. (1987). Electron densities in an RF etch plasma. In K. Akashi, & A. Kinbara (editors), ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1 (blz. 620-624). Tokyo.
Bisschops, T.H.J. ; Flipsen, R.F. ; Schram, D.C. / Electron densities in an RF etch plasma. ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1 . redacteur / K. Akashi ; A. Kinbara. Tokyo, 1987. blz. 620-624
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Bisschops, THJ, Flipsen, RF & Schram, DC 1987, Electron densities in an RF etch plasma. in K Akashi & A Kinbara (redactie), ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1 . Tokyo, blz. 620-624.

Electron densities in an RF etch plasma. / Bisschops, T.H.J.; Flipsen, R.F.; Schram, D.C.

ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1 . redactie / K. Akashi; A. Kinbara. Tokyo, 1987. blz. 620-624.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademic

TY - GEN

T1 - Electron densities in an RF etch plasma

AU - Bisschops, T.H.J.

AU - Flipsen, R.F.

AU - Schram, D.C.

PY - 1987

Y1 - 1987

M3 - Conference contribution

SP - 620

EP - 624

BT - ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1

A2 - Akashi, K.

A2 - Kinbara, A.

CY - Tokyo

ER -

Bisschops THJ, Flipsen RF, Schram DC. Electron densities in an RF etch plasma. In Akashi K, Kinbara A, redacteurs, ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1 . Tokyo. 1987. blz. 620-624