Electrical characterization of InP surface damages induced by ECR dry etching

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

Originele taal-2	Engels
Titel	Proc. 4th Annual Symposium of the IEEE/LEOS Benelux Chapter
Pagina's	127-130
Status	Gepubliceerd - 1999
Evenement	4th Annual Symposium of the IEEE/LEOS Benelux Chapter, 1999 - Mons, België Duur: 15 nov. 1999 → 15 nov. 1999

Congres	4th Annual Symposium of the IEEE/LEOS Benelux Chapter, 1999
Land/Regio	België
Stad	Mons
Periode	15/11/99 → 15/11/99
Ander	4th Annual Symposium of the IEEE/LEOS Benelux Chapter, Mons, Belgium, 15 November

Citeer dit

@inproceedings{e55706da655644a39491350fff098d3e,

title = "Electrical characterization of InP surface damages induced by ECR dry etching",

author = "M. Silova and E. Smalbrugge and \{Roy, van\}, B.H. and F. Karouta",

year = "1999",

language = "English",

pages = "127--130",

booktitle = "Proc. 4th Annual Symposium of the IEEE/LEOS Benelux Chapter",

note = "4th Annual Symposium of the IEEE/LEOS Benelux Chapter, 1999 ; Conference date: 15-11-1999 Through 15-11-1999",

}

TY - GEN

T1 - Electrical characterization of InP surface damages induced by ECR dry etching

AU - Silova, M.

AU - Smalbrugge, E.

AU - Roy, van, B.H.

AU - Karouta, F.

PY - 1999

Y1 - 1999

M3 - Conference contribution

SP - 127

EP - 130

BT - Proc. 4th Annual Symposium of the IEEE/LEOS Benelux Chapter

T2 - 4th Annual Symposium of the IEEE/LEOS Benelux Chapter, 1999

Y2 - 15 November 1999 through 15 November 1999

ER -