Electric Device with Vertical Component

E.P.A.M. Bakkers (Uitvinder), R.A.M. Wolters (Uitvinder), J.H. Klootwijk (Uitvinder)

Onderzoeksoutput: OctrooiOctrooi-publicatie

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A method of providing an electric device with a vertical component and the device itself are disclosed. The electric device may be a transistor device, such as a FET device, with a vertical channel, such as a gate around transistor, or double-gate transistor First an elongate structure, such as a nanowire is provided to a substrate. Subsequently, a first conductive layer separated from the substrate and from the elongate structure by a dielectric layer is provided. Further, a second conductive layer being separated from the first conductive layer by a separation layer is being provided in contact with at least a top section of the elongate structure.
Originele taal-2Engels
StatusGepubliceerd - 27 sep 2007

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  • Citeer dit

    Bakkers, E. P. A. M., Wolters, R. A. M., & Klootwijk, J. H. (2007). Electric Device with Vertical Component. (Octrooi Nr. US20070222074).