ECS Transactions: Preface

J. Flake; T. Ritzdorf; M. Koyangi; O. Leonte; G.S. Mathad; P. Ramm; H.S. Rathore; F. Roozeboom

ECS Transactions: Preface

J. Flake, T. Ritzdorf, M. Koyangi, O. Leonte, G.S. Mathad, P. Ramm, H.S. Rathore, F. Roozeboom

Plasma & Materials Processing

Onderzoeksoutput: Bijdrage aan tijdschrift › Editorial › Academic › peer review

Originele taal-2	Engels
Pagina's (van-tot)	iii-vi
Aantal pagina's	3
Tijdschrift	ECS Transactions
Volume	33
Nummer van het tijdschrift	12
Status	Gepubliceerd - 1 dec. 2010
Evenement	Processing, Materials, and Integration of Damascene and 3D Interconnects - 218th ECS Meeting - Las Vegas, NV, Verenigde Staten van Amerika Duur: 10 okt. 2010 → 15 okt. 2010

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Link to publication in Scopus

Citeer dit

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title = "ECS Transactions: Preface",

author = "J. Flake and T. Ritzdorf and M. Koyangi and O. Leonte and G.S. Mathad and P. Ramm and H.S. Rathore and F. Roozeboom",

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volume = "33",

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journal = "ECS Transactions",

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T2 - Processing, Materials, and Integration of Damascene and 3D Interconnects - 218th ECS Meeting

AU - Flake, J.

AU - Ritzdorf, T.

AU - Koyangi, M.

AU - Leonte, O.

AU - Mathad, G.S.

AU - Ramm, P.

AU - Rathore, H.S.

AU - Roozeboom, F.

PY - 2010/12/1

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M3 - Editorial

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SN - 1938-5862

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SP - iii-vi

JO - ECS Transactions

JF - ECS Transactions

IS - 12

Y2 - 10 October 2010 through 15 October 2010

ER -