Early formation of nanometer-sized dust particles in RF methane plasmas

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic

Originele taal-2	Engels
Titel	Proceedings of the 20st Symposium Plasma Physics & Radiation Technology 2008, 4-5 March 2008, Lunteren, The Netherlands
Status	Gepubliceerd - 2008

Citeer dit

@inproceedings{e7f6b8de71ea4c8bbdf4c65eba0e42b3,

title = "Early formation of nanometer-sized dust particles in RF methane plasmas",

author = "J. Beckers and G.D.G.J. Vacaresse and W.W. Stoffels",

year = "2008",

language = "English",

booktitle = "Proceedings of the 20st Symposium Plasma Physics \& Radiation Technology 2008, 4-5 March 2008, Lunteren, The Netherlands",

}