Dynamic aspects of cost of ownership of lithography systems

J.M. Santen, van; Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Intelligent Products and Production Systems (IPPS)

Dynamic aspects of cost of ownership of lithography systems

J.M. Santen, van, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Intelligent Products and Production Systems (IPPS)

Onderzoeksoutput: Scriptie › Pd Eng Thesis

Originele taal-2	Engels
Kwalificatie	Doctor in de Filosofie
Toekennende instantie
Begeleider(s)/adviseur	de Ron, Ad, Begeleider Lenders, H., Externe begeleider, Externe Persoon
Datum van toekenning	1 jan. 2003
Plaats van publicatie	Eindhoven
Uitgever	Technische Universiteit Eindhoven. Stan Ackermans Instituut
Gedrukte ISBN's	90-444-0338-9
Status	Gepubliceerd - 2003

Bibliografische nota

Eindverslag

Citeer dit

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title = "Dynamic aspects of cost of ownership of lithography systems",

author = "{Santen, van}, J.M. and {Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Intelligent Products and Production Systems (IPPS)}",

note = "Eindverslag",

year = "2003",

language = "English",

isbn = "90-444-0338-9",

publisher = "Technische Universiteit Eindhoven. Stan Ackermans Instituut",

}

TY - THES

T1 - Dynamic aspects of cost of ownership of lithography systems

AU - Santen, van, J.M.

AU - Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Intelligent Products and Production Systems (IPPS)

N1 - Eindverslag

PY - 2003

Y1 - 2003

M3 - Pd Eng Thesis

SN - 90-444-0338-9

PB - Technische Universiteit Eindhoven. Stan Ackermans Instituut

CY - Eindhoven

ER -