Direct stress-strain measurement from bulged membranes using topography image correlation

J. Neggers, J.P.M. Hoefnagels, F. Hild, S. Roux, M.G.D. Geers

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

37 Citaten (Scopus)
5 Downloads (Pure)


This paper discusses an experimental method to characterize thin films as they are encountered in microelectronic devices. The method enables the measurement of the stress and strain of pressure deflected bulged membranes without using a priori defined bulge equations. An enrichment to the Global Digital Image Correlation method is detailed to capture the membrane strain and curvature while robustly dealing with acquisition noise. The accuracy of the method is analyzed and compared to the standard bulge test method. The method is applied to a proof of principle experiment to investigate its applicability and accuracy. Additionally, it is shown for two experimental cases that the method provides accurate results, although the bulge equations do not hold.
Originele taal-2Engels
Pagina's (van-tot)717-727
Aantal pagina's11
TijdschriftExperimental Mechanics
Nummer van het tijdschrift5
StatusGepubliceerd - 2014

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