Diagnostics on the cascaded arc generated downstream plasma

M.C.M. Sanden, van de, G.J.H. Brussaard, W.M.M. Kessels, A. Graaf, de, M.F.A.M. Hest, van, K.G.Y. Letourneur, D.C. Schram

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Samenvatting

In this paper we will review four plasma diagnostics which have over the years lead to a better understanding of the plasma chemistry that occurs in the downstream plasma generated by a cascaded arc. The diagnostics reviewed comprise Thomson-Rayleigh scattering, Langmuir probe, ion mass spectrometry, residual gas analysis and infrared gas phase absorption. From these diagnostics important source properties as ion fluence, electron density and temperature downstream, the presence of large cluster ions, consumption of the injected precursor gas and the generation of new stable gases under processing conditions is obtained.
Originele taal-2Engels
TitelFrontiers in Low Temperature Plasma Diagnostics III : Book of Papers
Plaats van productieLausanne
UitgeverijEcole Polytechnique Fédérale de Lausanne
Pagina's73-82
StatusGepubliceerd - 1999
EvenementFrontiers in Low Temperature Plasma Diagnostics III, February 15-19, 1999, Saillon, Switzerland - Saillon, Zwitserland
Duur: 15 feb 199919 feb 1999

Publicatie series

NaamLRP / Ecole Polytechnique Fédérale de Lausanne
Volume629/99

Workshop

WorkshopFrontiers in Low Temperature Plasma Diagnostics III, February 15-19, 1999, Saillon, Switzerland
Land/RegioZwitserland
StadSaillon
Periode15/02/9919/02/99
AnderWorkshop on Frontiers in Low Temperature Plasma Diagnostics III, Saillon, Zwitserland

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