In this paper we will review four plasma diagnostics which have over the years lead to a better understanding of the plasma chemistry that occurs in the downstream plasma generated by a cascaded arc. The diagnostics reviewed comprise Thomson-Rayleigh scattering, Langmuir probe, ion mass spectrometry, residual gas analysis and infrared gas phase absorption. From these diagnostics important source properties as ion fluence, electron density and temperature downstream, the presence of large cluster ions, consumption of the injected precursor gas and the generation of new stable gases under processing conditions is obtained.
|Naam||LRP / Ecole Polytechnique Fédérale de Lausanne|
|Workshop||Frontiers in Low Temperature Plasma Diagnostics III, February 15-19, 1999, Saillon, Switzerland|
|Periode||15/02/99 → 19/02/99|
|Ander||Workshop on Frontiers in Low Temperature Plasma Diagnostics III, Saillon, Zwitserland|