Design of a multi-process multi-product wafer fab

E.J.J. Campen, van

Onderzoeksoutput: Scriptie › Dissertatie 2 (Onderzoek NIET TU/e / Promotie TU/e)

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Originele taal-2	Engels
Kwalificatie	Doctor in de Filosofie
Toekennende instantie	Mechanical Engineering
Begeleider(s)/adviseur	Rooda, Koos, Promotor Aarts, Emile H.L., Promotor Etman, L.F.P. (Pascal), Co-Promotor
Datum van toekenning	24 apr. 2001
Plaats van publicatie	Eindhoven
Uitgever	Technische Universiteit Eindhoven
Gedrukte ISBN's	90-386-2752-1
DOI's	https://doi.org/10.6100/IR543392
Status	Gepubliceerd - 2001

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@phdthesis{f43cd664282f4babb3d3b85b48feaed1,

title = "Design of a multi-process multi-product wafer fab",

author = "{Campen, van}, E.J.J.",

year = "2001",

doi = "10.6100/IR543392",

language = "English",

isbn = "90-386-2752-1",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 2 (Research NOT TU/e / Graduation TU/e)",

school = "Mechanical Engineering",

}