Design of a low-cost CMM with nanometer uncertainty

M.C.J.M. van Rie, E.J.C. Bos, F.G.A. Homburg

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

1 Citaat (Scopus)

Samenvatting

A novel ultra precision coordinate measuring machine (CMM) using three linear encoders and three vacuum preloaded (VPL) porous air bearings is designed and critical components are tested. The functional axes of the linear encoders intersect at a single point that coincides with the center of the probe tip. In this configuration the CMM complies with the Abbe principle over its whole range, which greatly decreases the influence of guideway deviations.

Originele taal-2Engels
TitelProceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
RedacteurenH. Van Brussel, Henny Spaan, P. Shore, Theresa Burke
Plaats van productieBedfordshire
UitgeverijEuropean Society for Precision Engineering and Nanotechnology
Pagina's384-387
Aantal pagina's4
ISBN van elektronische versie9780955308284
StatusGepubliceerd - 1 jan 2010
Evenement10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010 - Delft, Nederland
Duur: 31 mei 20104 jun 2010

Congres

Congres10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
LandNederland
StadDelft
Periode31/05/104/06/10

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