Design of a low-cost CMM with nanometer uncertainty

M.C.J.M. van Rie; E.J.C. Bos; F.G.A. Homburg

Design of a low-cost CMM with nanometer uncertainty

M.C.J.M. van Rie, E.J.C. Bos, F.G.A. Homburg

Group Den Toonder

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

1 Citaat (Scopus)

Samenvatting

A novel ultra precision coordinate measuring machine (CMM) using three linear encoders and three vacuum preloaded (VPL) porous air bearings is designed and critical components are tested. The functional axes of the linear encoders intersect at a single point that coincides with the center of the probe tip. In this configuration the CMM complies with the Abbe principle over its whole range, which greatly decreases the influence of guideway deviations.

Originele taal-2	Engels
Titel	Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
Redacteuren	H. Van Brussel, Henny Spaan, P. Shore, Theresa Burke
Plaats van productie	Bedfordshire
Uitgeverij	European Society for Precision Engineering and Nanotechnology
Pagina's	384-387
Aantal pagina's	4
ISBN van elektronische versie	9780955308284
Status	Gepubliceerd - 1 jan. 2010
Evenement	10th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2010) - Delft, Nederland Duur: 31 mei 2010 → 4 jun. 2010 Congresnummer: 10

Congres

Congres	10th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2010)
Land/Regio	Nederland
Stad	Delft
Periode	31/05/10 → 4/06/10

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van Rie, M. C. J. M., Bos, E. J. C., & Homburg, F. G. A. (2010). Design of a low-cost CMM with nanometer uncertainty. In H. Van Brussel, H. Spaan, P. Shore, & T. Burke (editors), Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010 (blz. 384-387). European Society for Precision Engineering and Nanotechnology.

van Rie, M.C.J.M. ; Bos, E.J.C. ; Homburg, F.G.A. / Design of a low-cost CMM with nanometer uncertainty. Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010. redacteur / H. Van Brussel ; Henny Spaan ; P. Shore ; Theresa Burke. Bedfordshire : European Society for Precision Engineering and Nanotechnology, 2010. blz. 384-387

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title = "Design of a low-cost CMM with nanometer uncertainty",

abstract = "A novel ultra precision coordinate measuring machine (CMM) using three linear encoders and three vacuum preloaded (VPL) porous air bearings is designed and critical components are tested. The functional axes of the linear encoders intersect at a single point that coincides with the center of the probe tip. In this configuration the CMM complies with the Abbe principle over its whole range, which greatly decreases the influence of guideway deviations.",

author = "{van Rie}, M.C.J.M. and E.J.C. Bos and F.G.A. Homburg",

year = "2010",

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language = "English",

pages = "384--387",

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booktitle = "Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010",

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note = "10th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2010) ; Conference date: 31-05-2010 Through 04-06-2010",

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van Rie, MCJM, Bos, EJC & Homburg, FGA 2010, Design of a low-cost CMM with nanometer uncertainty. in H Van Brussel, H Spaan, P Shore & T Burke (redactie), Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010. European Society for Precision Engineering and Nanotechnology, Bedfordshire, blz. 384-387, 10th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2010), Delft, Nederland, 31/05/10.

Design of a low-cost CMM with nanometer uncertainty. / van Rie, M.C.J.M.; Bos, E.J.C.; Homburg, F.G.A.

Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010. redactie / H. Van Brussel; Henny Spaan; P. Shore; Theresa Burke. Bedfordshire : European Society for Precision Engineering and Nanotechnology, 2010. blz. 384-387.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

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AU - Homburg, F.G.A.

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N2 - A novel ultra precision coordinate measuring machine (CMM) using three linear encoders and three vacuum preloaded (VPL) porous air bearings is designed and critical components are tested. The functional axes of the linear encoders intersect at a single point that coincides with the center of the probe tip. In this configuration the CMM complies with the Abbe principle over its whole range, which greatly decreases the influence of guideway deviations.

AB - A novel ultra precision coordinate measuring machine (CMM) using three linear encoders and three vacuum preloaded (VPL) porous air bearings is designed and critical components are tested. The functional axes of the linear encoders intersect at a single point that coincides with the center of the probe tip. In this configuration the CMM complies with the Abbe principle over its whole range, which greatly decreases the influence of guideway deviations.

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BT - Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010

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A2 - Shore, P.

A2 - Burke, Theresa

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van Rie MCJM, Bos EJC, Homburg FGA. Design of a low-cost CMM with nanometer uncertainty. In Van Brussel H, Spaan H, Shore P, Burke T, redacteurs, Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010. Bedfordshire: European Society for Precision Engineering and Nanotechnology. 2010. blz. 384-387

Design of a low-cost CMM with nanometer uncertainty

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