Samenvatting
A novel ultra precision coordinate measuring machine (CMM) using three linear encoders and three vacuum preloaded (VPL) porous air bearings is designed and critical components are tested. The functional axes of the linear encoders intersect at a single point that coincides with the center of the probe tip. In this configuration the CMM complies with the Abbe principle over its whole range, which greatly decreases the influence of guideway deviations.
Originele taal-2 | Engels |
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Titel | Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010 |
Redacteuren | H. Van Brussel, Henny Spaan, P. Shore, Theresa Burke |
Plaats van productie | Bedfordshire |
Uitgeverij | European Society for Precision Engineering and Nanotechnology |
Pagina's | 384-387 |
Aantal pagina's | 4 |
ISBN van elektronische versie | 9780955308284 |
Status | Gepubliceerd - 1 jan. 2010 |
Evenement | 10th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2010) - Delft, Nederland Duur: 31 mei 2010 → 4 jun. 2010 Congresnummer: 10 |
Congres
Congres | 10th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2010) |
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Land/Regio | Nederland |
Stad | Delft |
Periode | 31/05/10 → 4/06/10 |